Rf Power Generator Design

Paramount hfi compact cost effective integrated generator and solid state matching rf power delivery system.

Rf power generator design. Frequency standards have their accuracy defined with a number of different specifications and these have to be combined in the correct manner to give the overall accuracy. Mks rf power generators provide reliable solid state power for thin films processing equipment. With a broad power and frequency range the aurora series allows the user to stay within a single platform for all of your requirements. This is not the case for the pts generators thanks to the innovative design of their high efficiency amplifier stage.

With proven technology and reliability it contributes to the future of the ever evolving semiconductor industry. It also employs a wilkinson splitter to properly divide the input between the 2 hpa packages and a wilkinson combiner to properly combine the high output. It is used to tune a resonant circuits and adjust the gain of different rf stages. The high frequency hf section of the cdx provides up to 1500 watts of power with optional frequencies from 2 to 60 mhz.

The cdx dual frequency rf generator is offered in a design up to a 3000 watts. Very useful feature of the rf signal generator is its modulation capability. With most rf signal generators using frequency synthesizers this means that the frequency accuracy is determined by the frequency standard used within the generator. Avancer is a highly reliable rf power generator s brand equipped with various functions required by the next generation of semiconductor manufacturing processes such as pulsed rf output and power saving.

The conventional high efficiency rf amplifiers are structurally vulnerable to the reflected power. Available in a wide range of configurations 2 13 27 40 and 60 mhz. The versatile variable frequency lfgs generator 1250 w 40 to 500 khz suits a wide variety of semiconductor and general plasma processing applications including sputtering reactive ion etching plasma deposition polymerization and surface treatment. If it can modulate the frequency amplitude or frequency makes it non replaceable tool for rf design works.

Advanced energy s paramount hfi is a 13 56 mhz rf power delivery system with an integrated solid state matching network capable of operating across a wide variety of impedance zones. The pts engineers have dramatically improved the reliability and durability of the rf amplifier stage. The plasma rf generator power amplifier shown in our block diagram in the technical resources tab uses multiple push pull transistor packages to increase the output power beyond 1 2 kw.